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一种具有疏水性功能表面的单晶硅及其制备方法与应用

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Affilication of Author(s):机械工程学院

Type of Patent:发明

Application Number:202210980509.1

Number of Inventors:7

Service Invention or Not:no

Application Date:2022-08-16

Publication Date:2024-05-28

Authorization Date:2024-05-28

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