一种具有疏水性功能表面的单晶硅及其制备方法与应用
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Title:一种具有疏水性功能表面的单晶硅及其制备方法与应用
Institution:机械工程学院
Type of Patent:Invent
Application Number:202210980509.1
Number of Inventors:7
Service Invention or Not:No
Application Date:2022-08-16
Publication Date:2024-05-28
Authorization Date:2024-05-28
Release Time:2024-12-31