Hot-zone design and optimization of resistive heater for SiC single crystal growth

Release Time:2024-05-16

• Institution:
  新一代半导体材料研究院
• Title of Paper:
  Hot-zone design and optimization of resistive heater for SiC single crystal growth
• Journal:
  JOURNAL OF MATERIALS SCIENCE Journal
• First Author:
  王兴龙
• Document Code:
  E30905E21DD84A7D8F8435329EB0643D
• Issue:
  19
• Number of Words:
  3000
• Translation or Not:
  No
• Date of Publication:
  2024-05
• Release Time:
  2024-05-16