郁万成
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Enhancement of edge quality in SiC single crystals via flow field control with multi-zone graphite rings
  • Institution:
    新一代半导体材料研究院
  • Title of Paper:
    Enhancement of edge quality in SiC single crystals via flow field control with multi-zone graphite rings
  • Journal:
    JOURNAL OF ALLOYS AND COMPOUNDS
  • First Author:
    刘鹏
  • All the Authors:
    徐现刚,胡小波,陈秀芳,杨祥龙,Xuejian Xie
  • Document Code:
    C9EBC9AA11F54FED9AF176702C18F153
  • Issue:
    1068
  • Page Number:
    188578
  • Number of Words:
    5
  • Translation or Not:
    No
  • Date of Publication:
    2026-05
  • Release Time:
    2026-05-31
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