郁万成
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Suppressing SiC crystal edge decomposition through pore-type crucible
  • Institution:
    新一代半导体材料研究院
  • Title of Paper:
    Suppressing SiC crystal edge decomposition through pore-type crucible
  • Journal:
    VACUUM
  • First Author:
    张宁
  • All the Authors:
    仲光磊,胡小波,杨祥龙,Xuejian Xie,陈秀芳,徐现刚
  • Document Code:
    1924747454608990210
  • Volume:
    239
  • Number of Words:
    3000
  • Translation or Not:
    No
  • Date of Publication:
    2025-09
  • Release Time:
    2026-06-01
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