一种蓝宝石模板上GaN单晶衬底高温激光剥离装置及剥离方法

Release time:2024-10-17|Hits:

Affilication of Author(s):新一代半导体材料研究院

Type of Patent:发明

Application Number:202110855731.4

Number of Inventors:10

Service Invention or Not:no

Application Date:2021-07-28

Publication Date:2024-03-22

Authorization Date:2024-03-22