Return Baitao Zhang
Patents
一种蓝宝石模板上GaN单晶衬底高温激光剥离装置及剥离方法
Release Time:2024-10-17
  • Institution:
    新一代半导体材料研究院
  • Type of Patent:
    Invent
  • Application Number:
    202110855731.4
  • Number of Inventors:
    10
  • Service Invention or Not:
    No
  • Application Date:
    2021-07-28
  • Publication Date:
    2024-03-22
  • Authorization Date:
    2024-03-22
Copyright All Rights Reserved Shandong University Address: No. 27 Shanda South Road, Jinan City, Shandong Province, China: 250100
Information desk: (86) - 0531-88395114
On Duty Telephone: (86) - 0531-88364731 Construction and Maintenance: Information Work Office of Shandong University