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Suitable AlN Source Shape for Optimizing Gas Mass Transfer During AlN Crystal Growth

Release Time:2024-10-18| Hits:

Institution:新一代半导体材料研究院

Title of Paper:Suitable AlN Source Shape for Optimizing Gas Mass Transfer During AlN Crystal Growth

Journal:CRYSTAL GROWTH & DESIGN

First Author:曹文豪

Document Code:33084341CA4E4925B450246B4410A205

Issue:566

Number of Words:6000

Translation or Not:No

Date of Publication:2024-10

Release Time:2024-10-18

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