Suitable AlN Source Shape for Optimizing Gas Mass Transfer During AlN Crystal Growth
Affiliation of Author(s):
新一代半导体材料研究院
Journal:
CRYSTAL GROWTH & DESIGN
First Author:
曹文豪
Document Code:
33084341CA4E4925B450246B4410A205
Issue:
566
Number of Words:
6000
Translation or Not:
no
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