Title : Fabrication of three-dimensional(3D)woodpile structure photonic crystal with layer e-beam lithography

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Affiliation of Author(s):信息科学与工程学院

Title of Paper:Fabrication of three-dimensional(3D)woodpile structure photonic crystal with layer e-beam lithography

Journal:Appl. Phys A

All the Authors:Sam

First Author:Sam

Document Code:lw-102707

Volume:9

Issue:2

Page Number:329

Number of Words:7

Translation or Not:no

Date of Publication:2009-02-01