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一种类氧化硅柔性薄膜的生长方法 授权号：ZL202010639961 第一发明人

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Title:一种类氧化硅柔性薄膜的生长方法 授权号：ZL202010639961 第一发明人

Service Invention or Not:No

Release Time:2022-11-10

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