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Institution:信息科学与工程学院
Title of Paper:Significant Reliability Improvement by Inducing Dual Atomic-Thin Titanium Intercalation Layers in Hf 0.5 Zr 0.5 O 2 Films
Journal:IEEE Electron Device Letters
First Author:台路
Document Code:070A75DB4BDD4252BB1C14460AEFBD1C
Issue:44(5)
Page Number:1
Number of Words:3
Translation or Not:No
Date of Publication:2023-05
Release Time:2024-03-12