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中文
Xuepeng Zhan

Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates


Gender:Male
Alma Mater:吉林大学
Education Level:Postgraduate (Postdoctoral)
Degree:Doctor
Status:Employed
School/Department:信息科学与工程学院
Date of Employment:2019-07-01
College: School of Information Science and Engineering
E-Mail:
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Current position: 英文主页 >> Scientific Research >> Paper Publications
Toward Low-Thermal-Budget Processing in Ferroelectric Hf0.5Zr0.5O2 Thin Films by Ozone Interface Oxidation

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Institution:信息科学与工程学院

Title of Paper:Toward Low-Thermal-Budget Processing in Ferroelectric Hf0.5Zr0.5O2 Thin Films by Ozone Interface Oxidation

Journal:IEEE Electron Device Letters

First Author:台路

Document Code:1737382290592821250

Volume:44

Issue:12

Page Number:1959-1962

Number of Words:3

Translation or Not:No

Date of Publication:2023-12

Release Time:2024-05-15

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