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Paper Publications
Investigation of small-angle SiC ICP etching assisted by optical emission spectroscopy diagnostics
Release Time:2026-01-21| Hits:
Institution:新一代半导体材料研究院
Title of Paper:Investigation of small-angle SiC ICP etching assisted by optical emission spectroscopy diagnostics
Journal:VACUUM
First Author:苑登文
All the Authors:徐现刚,徐明升,韩吉胜
Document Code:88D6EC2C577645B5A837E2C70B49E06D
Issue:246
Page Number:115050
Number of Words:4
Translation or Not:No
Date of Publication:2025-12
Release Time:2026-01-21
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