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Patents
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2025-09-16
一种基于动态参数刻蚀与后处理的碳化硅刻蚀方法
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2025-06-12
测量SiC MOSFET沟道近界面陷阱密度的方法
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2024-08-22
一种碳化硅器件双层金属的刻蚀方法
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2025-02-21
一种SiC器件欧姆接触及其制备方法和应用
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