Allen Zhuang ZHUO
Professor
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基于深度学习的半导体芯片智能分选设备

本项目基于晶体硅、第三代半导体SiC 和GaN等芯片Wafer的表面特性、电气特性、光谱特性等系列数据库的建立,利用神经卷积网络(CNN),训练并建立WAFER分选标准,设计自动分选设备,对Wafer进行分类筛选。

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