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大尺寸半导体SiC单晶衬底材料

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  • Project Name:大尺寸半导体SiC单晶衬底材料

  • Institution:晶体材料研究院(晶体材料全国重点实验室)

  • Leading Scientist:徐现刚

  • Supported by:科技部 863

  • Nature of Project:纵向

  • Project Level:National

  • Project Participants:徐现刚,胡小波,蒋民华,于光伟

  • Project Number:kyxm-28572

  • Project Approval Number:04AA31G030

  • Date of Project Approval:2005-03-01

  • Scheduled Completion Time:2006-04-01

  • Date of Project Completion:2006-04-01

  • Date of Project Initiation:2005-03-01

  • Release Time:2019-04-18

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