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    半导体单晶加工研究

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    • Project Name:半导体单晶加工研究

    • Institution:晶体材料研究院（晶体材料全国重点实验室）

    • Leading Scientist:陈秀芳

    • Supported by:省自主创新专项（华光）

    • Nature of Project:纵向

    • Project Level:省、部委级

    • Project Participants:陈秀芳,李红云,胡小波

    • Project Number:kyxm-29016

    • Project Approval Number:11250004011003

    • Date of Project Approval:2010-01-01

    • Scheduled Completion Time:2012-12-31

    • Date of Project Completion:2012-12-31

    • Date of Project Initiation:2010-01-01

    • Release Time:2019-04-18
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