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Project Name:碳化硅晶体生长非线性模拟与控制系统
Institution:晶体材料研究院(晶体材料全国重点实验室)
Leading Scientist:彭燕
Supported by:Shandong Academy of Sciences - 2014 Shandong Provincial Independent Innovation Special Project
Nature of Project:纵向
Project Level:省、部委级
Project Participants:彭燕,陈秀芳,胡小波
Project Number:kyxm-58724
Project Approval Number:2014ZZCX04215
Date of Project Approval:2014-01-01
Scheduled Completion Time:2017-12-31
Date of Project Completion:2017-12-31
Date of Project Initiation:2014-01-01
Release Time:2019-04-18