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4fOLLw09KF7WYtXIwRxd6oOPAZIH7vAtbd6RoEVaJzAYBetr5mEX1AXGiLAU
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    Influence of Different Heater Structures on the Temperature Field of AlN Crystal Growth by Resistance Heating

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    • Institution:新一代半导体材料研究院

    • Title of Paper:Influence of Different Heater Structures on the Temperature Field of AlN Crystal Growth by Resistance Heating

    • Journal:MATERIALS

    • First Author:俞瑞仙

    • Document Code:A4B0D7D429914708972A77CA022C1D5A

    • Issue:14

    • Page Number:7441

    • Number of Words:3000

    • Translation or Not:No

    • Date of Publication:2021-12

    • Release Time:2022-05-15
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