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Influence of Different Heater Structures on the Temperature Field of AlN Crystal Growth by Resistance Heating

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  • Affiliation of Author(s):新一代半导体材料研究院

  • Journal:MATERIALS

  • First Author:俞瑞仙

  • Document Code:A4B0D7D429914708972A77CA022C1D5A

  • Issue:14

  • Page Number:7441

  • Number of Words:3000

  • Translation or Not:no

  • Date of Publication:2021-12-04

  • Date of Publication:2021-12-04
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