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    晶格畸变检测仪研究碳化硅晶片中位错缺陷分布

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    • Institution:晶体材料研究院（晶体材料全国重点实验室）

    • Title of Paper:晶格畸变检测仪研究碳化硅晶片中位错缺陷分布

    • Journal:《人工晶体学报》

    • First Author:杨祥龙

    • Document Code:A855FB7960E2436D8F3E94DEBB7A217F

    • Issue:4

    • Translation or Not:No

    • Date of Publication:2021-04

    • Release Time:2022-05-31
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