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Reduction of threading screw dislocations in 4H-SiC crystals by physical vapor transport growth

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  • Affiliation of Author(s):新一代半导体材料研究院

  • First Author:胡国杰

  • Document Code:1655407611637108738

  • Page Number:140-142

  • Number of Words:3000

  • Translation or Not:no

  • Date of Publication:2023-01-01

  • Date of Publication:2023-01-01
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