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利用金刚石线和金刚石砂浆同时切割SiC单晶的方法

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  • Affilication of Author(s):晶体材料研究所

  • Disigner of the Invention:chenxiufang,xuxiangang

  • Application Number:2016102171009

  • Number of Inventors:3

  • Service Invention or Not:no

  • Application Date:2016-04-08

  • Application Date:2016-04-08
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