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    利用金刚石线和金刚石砂浆同时切割SiC单晶的方法

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    • Title:利用金刚石线和金刚石砂浆同时切割SiC单晶的方法

    • Institution:晶体材料研究所

    • Application Number:2016102171009

    • Number of Inventors:3

    • Service Invention or Not:No

    • Application Date:2016-04-08

    • Release Time:2019-01-26
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