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一种蓝宝石模板上GaN单晶衬底高温激光剥离装置及剥离方法

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  • Affilication of Author(s):新一代半导体材料研究院

  • Type of Patent:发明

  • Application Number:202110855731.4

  • Number of Inventors:10

  • Service Invention or Not:no

  • Application Date:2021-07-28

  • Publication Date:2024-03-22

  • Authorization Date:2024-03-22

  • Publication Date:2024-03-22

  • Application Date:2021-07-28

  • Authorization Date:2024-03-22
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