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Influence of sapphire substrate thickness on the characteristics of AlGaN/AlN/GaN heterostructure field-effect transistors

Release Time:2019-04-14
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Institution:
微电子学院
Title of Paper:
Influence of sapphire substrate thickness on the characteristics of AlGaN/AlN/GaN heterostructure field-effect transistors
Journal:
Superlattices and Microstructures
Document Code:
lw-173310
Volume:
85
Translation or Not:
No
Date of Publication:
2015-05
Release Time:
2019-04-14