山东大学教师主页李贻斌一种半导体加工晶圆超声悬浮驱动装置 Home

Personal Information

Academic Titles:主任
Other Post:山东省自动化学会理事长、山东省工程师协会副会长
Degree:Doctoral Degree in Engineering
Status:Employed
School/Department:控制科学与工程学院

Gender:Male

Education Level:Postgraduate (Doctoral)

Alma Mater:天津大学

Current position: Home / Scientific Research / Patents

一种半导体加工晶圆超声悬浮驱动装置

Release Time:2023-09-07 | Hits:

Institution:控制科学与工程学院

Type of Patent:Invent

Application Number:202210652114.9

Number of Inventors:5

Service Invention or Not:No

Application Date:2022-06-10

Publication Date:2024-05-03

Authorization Date:2024-05-03