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用于MPCVD 金刚石薄膜生长的高表面质量HTHP 金刚石的制备

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  • Affiliation of Author(s):新一代半导体材料研究院

  • Journal:《材料导报》

  • First Author:彭燕

  • Indexed by:Applied Research

  • Document Code:3166619AA9A64481B04FBF8B56201AB9

  • Issue:4

  • Number of Words:3000

  • Translation or Not:no

  • Date of Publication:2021-02-25

  • Date of Publication:2021-02-25
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