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用于MPCVD金刚石薄膜生长的高表面质量HTHP金刚石的制备

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  • Affiliation of Author(s):新一代半导体材料研究院

  • Journal:《材料导报》

  • Key Words:激光切割;化学机械抛光;HTHP金刚石;MPCVD金刚石薄膜

  • First Author:段鹏

  • Document Code:1478202486018805762

  • Volume:35

  • Issue:04

  • Page Number:4034-4037+4041

  • Number of Words:3000

  • Translation or Not:no

  • Date of Publication:2021-02-24

  • Date of Publication:2021-02-24
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