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Homoepitaxy Growth of Single Crystal Diamond under 300 torr Pressure in the MPCVD System

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  • Affiliation of Author(s):新一代半导体材料研究院

  • Journal:MATERIALS

  • First Author:胡小波

  • Document Code:909C8F1752E347E8A4F8072978DDD687

  • Issue:23

  • Number of Words:3000

  • Translation or Not:no

  • Date of Publication:2019-12-28

  • Date of Publication:2019-12-28
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