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Hot-zone design and optimization of resistive heater for SiC single crystal growth

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  • Affiliation of Author(s):新一代半导体材料研究院

  • Journal:JOURNAL OF MATERIALS SCIENCE Journal

  • First Author:王兴龙

  • Document Code:E30905E21DD84A7D8F8435329EB0643D

  • Issue:19

  • Number of Words:3000

  • Translation or Not:no

  • Date of Publication:2024-05-14

  • Date of Publication:2024-05-14
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