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Origins and characterization techniques of stress in SiC crystals: A review

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  • Affiliation of Author(s):新一代半导体材料研究院

  • Journal:PROGRESS IN CRYSTAL GROWTH AND CHARACTERIZATION OF MATERIALS

  • First Author:田佳奇

  • Document Code:7A7738E137AC4784903C8174DE36FE3A

  • Issue:70

  • Number of Words:3000

  • Translation or Not:no

  • Date of Publication:2024-02-24

  • Date of Publication:2024-02-24
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