中文
Home > Scientific Research > Paper Publications

低位错密度8英寸导电型碳化硅单晶衬底制备

Hits:

  • Affiliation of Author(s):新一代半导体材料研究院

  • Journal:Journal of Inorganic Materials

  • First Author:熊希希

  • Document Code:1712640514601566209

  • Page Number:1-2

  • Number of Words:3000

  • Translation or Not:no

  • Date of Publication:2023-09-15

  • Date of Publication:2023-09-15
Copyright All Rights Reserved Shandong University Address: No. 27 Shanda South Road, Jinan City, Shandong Province, China: 250100
Information desk: (86) - 0531-88395114
On Duty Telephone: (86) - 0531-88364731 Construction and Maintenance: Information Work Office of Shandong University		 Click:
  MOBILE Version

The Last Update Time:..