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Growth of 2-inch diamond films on 4H–SiC substrate by microwave plasma CVD for enhanced thermal performance

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  • Affiliation of Author(s):新一代半导体材料研究院

  • Journal:VACUUM

  • First Author:胡秀飞

  • Document Code:1637725468371140609

  • Volume:211

  • Number of Words:3000

  • Translation or Not:no

  • Date of Publication:2023-05-01

  • Date of Publication:2023-05-01
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