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    Significant Reliability Improvement by Inducing Dual Atomic-Thin Titanium Intercalation Layers in Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> Films

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    • Institution:信息科学与工程学院

    • Title of Paper:Significant Reliability Improvement by Inducing Dual Atomic-Thin Titanium Intercalation Layers in Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> Films

    • Journal:IEEE Electron Device Letters

    • First Author:台路

    • Document Code:CF164AC117BB45CE8FAA0F82BEDC4AE4

    • Volume:44

    • Issue:5

    • Page Number:753

    • Number of Words:3000

    • Translation or Not:No

    • Date of Publication:2023-05

    • Release Time:2023-10-31
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