中文
    Home > Scientific Research > Paper Publications

    Toward Low-Thermal-Budget Processing in Ferroelectric Hf0.5Zr0.5O2 Thin Films by Ozone Interface Oxidation

    Hits:：

    • Institution:信息科学与工程学院

    • Title of Paper:Toward Low-Thermal-Budget Processing in Ferroelectric Hf0.5Zr0.5O2 Thin Films by Ozone Interface Oxidation

    • Journal:IEEE Electron Device Letters

    • First Author:台路

    • Document Code:1737382290592821250

    • Volume:44

    • Issue:12

    • Page Number:1959-1962

    • Number of Words:3

    • Translation or Not:No

    • Date of Publication:2023-12

    • Release Time:2024-05-15
    Copyright All Rights Reserved Shandong University Address: No. 27 Shanda South Road, Jinan City, Shandong Province, China: 250100
    Information desk: (86) - 0531-88395114
    On Duty Telephone: (86) - 0531-88364731 Construction and Maintenance: Information Work Office of Shandong University    		 Click:
      MOBILE Version

    The Last Update Time:..