Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
The Last Update Time: ..
Affiliation of Author(s):微电子学院
Journal:Journal of Vacuum Science & Technology A
All the Authors:xinqian
First Author:辛倩
Indexed by:Unit Twenty Basic Research
Document Code:lw-199201
Volume:34
Page Number:04C101
Translation or Not:no
Date of Publication:2016-04-08