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Electron transport mechanism through ultrathin Al2O3 films grown at low temperatures using atomic–layer deposition
Affiliation of Author(s):微电子学院
Journal:SEMICONDUCTOR SCIENCE AND TECHNOLOGY
All the Authors:xinqian,Li Yuxiang,Song A M
First Author:马鹏飞
Indexed by:Applied Research
Document Code:88E26D2A696048E9B15A76399673DAD1
Volume:34
Issue:10
Page Number:105004
Translation or Not:no
Date of Publication:2019-07-11