Affiliation of Author(s):新一代半导体材料研究院
Journal:VACUUM
First Author:胡秀飞
Document Code:1637725468371140609
Volume:211
Number of Words:3000
Translation or Not:no
Date of Publication:2023-05-01
Date of Publication:2023-05-01
徐明升
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Gender:Male
Education Level:Postgraduate (Postdoctoral)
Alma Mater:Shandong University
Paper Publications
Growth of 2-inch diamond films on 4H–SiC substrate by microwave plasma CVD for enhanced thermal performance
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