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一种表面活性剂辅助气相生长小直径、高性能 III-V 族半导体纳米线的方法

Release Time:2021-09-28 Hits:

Title:一种表面活性剂辅助气相生长小直径、高性能 III-V 族半导体纳米线的方法
Institution:集成电路学院
Type of Patent:Invent
Application Number:201910400878.7
Number of Inventors:1
Service Invention or Not:No
Publication Date:2021-08-13
Authorization Date:2021-08-13
Release Time:2021-09-28

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