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Project Name:10纳米样品台高精度控制系统
Institution:机械工程学院
Leading Scientist:闫鹏
Nature of Project:横向
Project Number:E6BAC321A7421C79E053BE07C2CA0FA2
Date of Project Approval:2022-07-01
Scheduled Completion Time:2025-06-30
Date of Project Completion:2025-06-30
Date of Project Initiation:2022-07-01
Release Time:2024-04-16