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Modeling and Control of a Novel X-Y Parallel Piezoelectric-actuator Driven Nanopositioner
Affiliation of Author(s):机械工程学院
Journal:Proceedings of American Control Conference, 2014
First Author:yanpeng
Indexed by:Unit Twenty Basic Research
Document Code:lw-160550
Page Number:1003
Translation or Not:no
Date of Publication:2014-06-04