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An optimized design and modeling of a beam flexure-based parallel servo system supporting large stroke nano manipulation
Affiliation of Author(s):机械工程学院
Journal:Proceedings of the 54th IEEE Conference on Decision and Control
First Author:yanpeng
Indexed by:Unit Twenty Basic Research
Document Code:lw-172077
Page Number:7341
Translation or Not:no
Date of Publication:2015-12-15