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Institution:机械工程学院
Title of Paper:具有耦合补偿功能的大行程二维柔性平台
Journal:光学精密工程,
First Author:闫鹏
Document Code:lw-184958
Volume:24
Issue:4
Page Number:804
Translation or Not:No
Date of Publication:2016-04
Release Time:2019-04-14