具有耦合补偿功能的大行程二维柔性平台
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Affiliation of Author(s):机械工程学院
Journal:光学精密工程,
First Author:yanpeng
Indexed by:Applied Research
Document Code:lw-184958
Volume:24
Issue:4
Page Number:804
Translation or Not:no
Date of Publication:2016-04-01
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