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A Stiffness Modeling Approach for Multi-Leaf Spring Mechanism Supporting Coupling Error Analysis of Nano-Stages
Affiliation of Author(s):机械工程学院
Journal:International Journal of Precision Engineering and Manufacturing
All the Authors:yanpeng
First Author:鲁帅帅
Indexed by:Unit Twenty Basic Research
Document Code:325E5FF82AE843C18826CD33878C97DC
Volume: 18
Issue:6
Page Number:863
Translation or Not:no
Date of Publication:2017-06-01