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Institution:机械工程学院
Title of Paper:Development of a compact XYZ nanopositioner supporting optical scanning
Journal:2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)
First Author:闫鹏
Document Code:F7B611387E9547A0996B33277A2599C5
Translation or Not:No
Date of Publication:2018-08
Release Time:2019-10-22