Modeling and Control of a Novel X-Y Parallel Piezoelectric-actuator Driven Nanopositioner
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Institution:机械工程学院
Title of Paper:Modeling and Control of a Novel X-Y Parallel Piezoelectric-actuator Driven Nanopositioner
First Author:闫鹏,闫鹏
All the Authors:闫鹏
Document Code:lw-160550
Page Number:1003
Translation or Not:No
Date of Publication:2014-06
Release Time:2019-10-24
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