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Flexure-hinges guided nano-stage for precision manipulations: Design, modeling and control
Affiliation of Author(s):机械工程学院
Journal:International Journal of Precision Engineering and Manufacturing
All the Authors:yanpeng
First Author:闫鹏,yanpeng
Document Code:lw-172067
Volume:16
Issue:11
Page Number:2245
Translation or Not:no
Date of Publication:2015-10-01