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Institution:机械工程学院
Title of Paper:A large range XY parallel micro-motion system with optical encoder displacement feedback
Journal:2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (IEEE 3M-NANO 2018)
First Author:闫鹏,闫鹏
All the Authors:闫鹏
Document Code:8EA191A8D1FB49D7AFB470DBCE28A8A7
Translation or Not:No
Date of Publication:2018-08
Release Time:2019-10-25