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Gender:Male
Status:Employed
School/Department:机械工程学院
Date of Employment:2011-11-22
College: School of Mechanical Engineering
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Long stroke displacement measurement with reduced coupling error supporting high precision control of a beam flexure-based micro-stage

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Institution:机械工程学院

Title of Paper:Long stroke displacement measurement with reduced coupling error supporting high precision control of a beam flexure-based micro-stage

Journal:REVIEW OF SCIENTIFIC INSTRUMENTS

First Author:鲁帅帅

Document Code:F478F5B38B10470C8A084DF1CC66A03F

Volume:91

Issue:7

Translation or Not:No

Date of Publication:2020-07

Release Time:2021-05-31

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