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Long stroke displacement measurement with reduced coupling error supporting high precision control of a beam flexure-based micro-stage
Affiliation of Author(s):机械工程学院
Journal:REVIEW OF SCIENTIFIC INSTRUMENTS
First Author:鲁帅帅
Document Code:F478F5B38B10470C8A084DF1CC66A03F
Volume:91
Issue:7
Translation or Not:no
Date of Publication:2020-07-01