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闫鹏

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Gender:Male
Status:Employed
School/Department:机械工程学院
Date of Employment:2011-11-22
College: School of Mechanical Engineering
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Low thermal budget lead zirconate titanate thick films integrated on Si for piezo-MEMS applications

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Institution:材料科学与工程学院

Title of Paper:Low thermal budget lead zirconate titanate thick films integrated on Si for piezo-MEMS applications

Journal:MICROELECTRONIC ENGINEERING

First Author:王莹莹

Document Code:5B1B635EA0894BF88D8EE307425270A2

Volume:219

Number of Words:5522

Translation or Not:No

Date of Publication:2020-01

Release Time:2021-10-08

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