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中文
闫鹏

Professor


Gender:Male
Status:Employed
School/Department:机械工程学院
Date of Employment:2011-11-22
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Current position: Home >> Scientific Research >> Paper Publications

Low thermal budget lead zirconate titanate thick films integrated on Si for piezo-MEMS applications

Hits: Praise

Affiliation of Author(s):材料科学与工程学院

Journal:MICROELECTRONIC ENGINEERING

First Author:王莹莹

Indexed by:Unit Twenty Basic Research

Document Code:5B1B635EA0894BF88D8EE307425270A2

Volume:219

Number of Words:5522

Translation or Not:no

Date of Publication:2020-01-15

 

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