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Enhanced robust nanopositioning control for an X-Y piezoelectric stage with sensor delays: An infinite dimensional H∞ optimization approach
Affiliation of Author(s):机械工程学院
Journal:Mechatronics
First Author:闫鹏
Document Code:957A135866294D8FAF2BF4F666C26B2E
Issue:102511
Number of Words:6126
Translation or Not:no
Date of Publication:2021-03-23