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Enhanced robust nanopositioning control for an X-Y piezoelectric stage with sensor delays: An infinite dimensional H∞ optimization approach
Affiliation of Author(s):机械工程学院
Journal:Mechatronics
Key Words:PToptimization;Piezoelectric stage;Sensor-induced delay;H-infinity optimization;Nanopositioning control
First Author:张志名
Document Code:1403164973571510274
Volume:75
Number of Words:3
Translation or Not:no
Date of Publication:2021-05-01