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Title:一种三自由度大行程柔性纳米定位平台
Institution:机械工程学院
Type of Patent:发明
Application Number:201510287783.0
Number of Inventors:6
Service Invention or Not:No
Application Date:2015-05-29
Publication Date:2016-08-31
Authorization Date:2015-05-29
Release Time:2018-12-06